7–10 Nov 2023
SLAC
America/Los_Angeles timezone

3D Heterogeneous Integration Multi-Project Wafer

9 Nov 2023, 13:50
15m
48/1-112C/D - Redwood C/D (SLAC)

48/1-112C/D - Redwood C/D

SLAC

60
Oral RDC4: Readout and ASICs RDC4

Speaker

Farah Fahim (Fermilab)

Description

Fermilab is organizing a 3D Heterogeneous Integration Multi-Project Wafer (3DHI-MPW) run to meet the current advanced packaging needs of scientific instrumentation as well as to further the state-of-the-art in advanced packaging for small-volume users.

Our goals are to:
1. Leverage high density face-to-face/face-to-back wafer bonding for current and future projects
2. Start the first of many community-organized, regularly-scheduled 3DHI-MPW runs in order to:
1. Develop the 3DHI low-volume prototyping community, and
2. Create a 3DHI-MPW fabrication methodology analogous to the 2D VLSI MPW fabrication methodology currently enjoyed by the HEP community.
3. Advance and standardize industry-wide TSVs, (including)
1. Define and develop open standards to facilitate 3D integration of diverse heterogenous wafers from multiple foundries

Primary authors

Farah Fahim (Fermilab) James Hoff (Fermilab)

Presentation materials