15–17 Jul 2026
SLAC
America/Los_Angeles timezone

AI/ML Needs for a Commercial EUV Light Source

15 Jul 2026, 09:00
20m
48/1-112A/B/C/D - Redwood A/B/C/D (SLAC)

48/1-112A/B/C/D - Redwood A/B/C/D

SLAC

90
Operation of scientific systems: Accelerators and Tokamaks Operation of scientific systems

Speaker

Christopher Pierce (xLight Inc.)

Description

xLight Inc. is developing an accelerator-driven extreme ultraviolet (EUV) light source for the semiconductor manufacturing industry. This machine must operate autonomously, a goal we believe will be achieved through AI/ML techniques. In this talk, we offer an industry perspective on the proposal for a dedicated AI/ML accelerator test facility. We share some of the unique challenges in deploying a commercial EUV light source that AI/ML techniques may address, and suggest capabilities that would help such a facility address the needs of commercial partners. We end with a high-level picture of how AI/ML fits into the project of developing a commercial particle accelerator to revolutionize the chip manufacturing industry.

Author

Christopher Pierce (xLight Inc.)

Presentation materials